Combination nonvolatile memory using unified technology with byte, page and block write and simultaneous read and write operations

ABSTRACT

A combination EEPROM and Flash memory is described containing cells in which the stacked gate transistor of the Flash cell is used in conjunction with a select transistor to form an EEPROM cell. The select transistor is made sufficiently small so as to allow the EEPROM cells to accommodate the bit line pitch of the Flash cell, which facilitates combining the two memories into memory banks containing both cells. The EEPROM cells are erased by byte while the Flash cells erased by block. The small select transistor has a small channel length and width, which is compensated by increasing gate voltages on the select transistor and pre-charge bitline during CHE program operation.

This application is a Divisional application of U.S. Ser. No.11/011,306, filed on Dec. 14, 2004 (AP02-009D), which is a divisionalapplication of U.S. Ser. No. 10/351,179 filed on Jan. 24, 2003, nowissued as U.S. Pat. No. 6,850,438 (AP 02-009), which claims benefit ofpriority of the filing date to: 1) U.S. Provisional Application No.60/394,202, filed on Jul. 5, 2002 and is incorporated herein byreference; 2) U.S. Provisional Application No. 60/426,614, filed on Nov.14, 2002 and is incorporated herein by reference; and 3) U.S.Provisional Application No. 60/429,261, filed on Nov. 25, 2002 and isincorporated herein by reference.

RELATED PATENT APPLICATIONS

U.S. patent application Ser. No. 09/852,247 to F. C. Hsu et al filed onMay 9, 2001 and assigned to the same assignee as the present invention.

U.S. patent application Ser. No. 09/891,782 to F. C. Hsu et al filed onJun. 27, 2001 and assigned to the same assignee as the presentinvention.

BACKGROUND OF THE INVENTION

1. Field of Invention

The present invention relates to a semiconductor memory and inparticular a combinational nonvolatile memory utilizing bothone-transistor Flash and two-transistor EEPROM memory made from the sametechnology and providing simultaneous read and write operations.

2. Description of Related Art

Many electronic applications require writing data into the memory whileat the same time reading program code from the memory, and many systemsutilize both block-erasable Flash memory and byte-erasable EEPROM toperform this dual function. The block-erasable Flash memory storesprogram codes having less frequent update rates, and the byte-erasableEEPROM stores the data and parameters with a high update frequency ratewith self-timed Write control. This allows data to be written to theEEPROM while the program code is read from the Flash memorysimultaneously.

Since the data and parameters stored in the system needs to befrequently updated in small units of a byte or a page, the data ispreferred to be stored in a byte-erasable EEPROM. Using an EEPROM tostore both the program code and data is not very cost effective becauseof the large cell size of the EEPROM. Using Flash memory to store boththe program code and data is not easy because Flash memory lacks thebyte-level data alterability as provided in an EEPROM. Flash memoryerases a large block size of data, 64K×8, at one time because of theFlash memory array architecture. It is very difficult to performbyte-level data update with this block erase feature; therefore, thereis a software solution that is proposed to emulate the byte-erasableEEPROM with the architecture of block-erasable Flash memory. As aresult, a highly complex software technique is required which causesdrastic system performance degradation, and sometimes may causereliability problem.

The integration of a Flash and EEPROM memory in a single memory chip ishighly desirable for reducing cost, device footprint, and powerconsumptions while providing superior performance; however, since thecell structure and process technology is different between Flash andEEPROM memories, combining these two memories into one chip requiresvery complex process flow, which is not cost effective.

In U.S. Pat. No. 6,370,081 (Sakui, et al.) a nonvolatile memory cell isdirected to having a memory cell and two select transistors sandwichingthe memory cell. One block of memory nonvolatile memory cells has onecontrol gate line. The nonvolatile memory cells connected to one controlgate line form one page. A sense amplifier having a latch function isconnected to a bit line. In a data change operation, data of memorycells of one page are read to the sense amplifiers. After the data issensed and stored in the sense amplifiers a page erase is performed. Thedata from the sense amplifiers are programmed in the memory cells of onepage. Data in the sense amplifiers maybe changed in the sense amplifiersprior to the reprogramming to allow byte or page data programming.

U.S. Pat. No. 6,400,604 (Noda) is directed to a nonvolatilesemiconductor memory device having a data reprogram mode. The memory hasa memory cell array, a page buffer for storing one page data to beprogrammed to memory cells, which are selected in accordance with a pageaddress signal. The memory further has an internal column addressgenerating circuit for generating column addresses of the one page withinputting the page address signal in order to transfer the one datastored in the page buffer to the memory cells, a column decoderreceiving the column addresses from the internal column addressgenerating circuit, and a control circuit having a data reprogram mode.The data reprogram mode erases one page data stored in the memory cells,which are selected in accordance with the page address signal andprograms the one page data stored in the page buffer to the memory cellswhich are selected.

U.S. Pat. No. 6,307,781 (Shum) is directed to providing a two transistorcell NOR architecture flash memory. The floating gate transistor isplaced between the selection transistor and an associated bit line asshown in FIGS. 2 a-c. The flash memory is deposited within a triple welland operates according to a Fowler-Nordheim tunnel mechanism.Programming of memory cells involves tunneling of carriers through gateoxide from a channel region to a floating gate rather than tunnelingfrom a drain or source region to the floating gate.

U.S. Pat. No. 6,212,102 (Georgakos, et al.) is directed to illustratingan EEPROM with two-transistor memory cells with source-side selection.The voltage required to program a memory cell is delivered via a sourceline.

U.S. Pat. No. 6,266,274 (Pockrandt, et al.) is directed to anon-volatile two-transistor memory cell which has an N-channel selectiontransistor and an N-channel memory transistor. The drive circuitry forthe cell includes a P-channel transfer transistor. A transfer channel isconnected to a row line leading to the memory cell.

U.S. Pat. No. 6,174,759 (Verhaar, et al.) directed to an EEPROM cellthat is provided with such a high-voltage transistor as a selectiontransistor similar to that described in FIGS. 2 a-c. Apart from then-well implantation, high-voltage transistors of the p-channel arelargely manufactured by means of the same process steps as the p-channeltransistors in the logic, so that the number of process steps remainslimited.

U.S. Pat. No. 6,326,661 (Dormans, et al) is directed to a floating gatememory cell having a large capacitive coupling between the control gateand the floating gate. The control gate is capacitive coupled to thesubstantially flat surface portion of the floating gate and to at leastthe side-wall portions of the floating gate facing the source and thedrain, and ends above the substantially flat surface portion of theselect gate. These measures provide a semiconductor device having alarge capacitive coupling between the control gate and the floating gateof the memory cell thus increasing the coupling ratio.

U.S. Pat. No. 5,748,538 (Lee, et al.), assigned to the same assignee asthe present invention, describes an OR-plane memory cell array for flashmemory with bit-based write capability. The memory cell array of a flashelectrically erasable programmable read only memory (EEPROM) includesnonvolatile memory cells arranged in rows and columns. The sources ofnonvolatile memory cells in the same memory block are connected to amain source line through a control gate. Similarly, the drains of thenonvolatile memory cells of the same memory block are connected to amain bit line. The separate source and drains in the column directionare designed for a bit-based write capability. Writing, such as erasingor programming, of a selected nonvolatile memory cell uses theFowler-Nordheim tunneling method and can be accomplished due to theprogramming or erase inhibit voltage that is applied to non-selectednonvolatile memory cells.

SUMMARY OF THE INVENTION

It is an objective of the present invention to provide a non-volatilememory technology, cell structure, array architecture, and operationsthat allows using a single technology to manufacture both Flash memoryarray and EEPROM array in one chip.

It is another objective of the present invention to form atwo-transistor EEPROM cell from a combination of the stacked gate of theFlash memory cell and a select transistor.

It is also another objective of the present invention to provide atwo-transistor EEPROM cell that has a footprint sufficiently small to becompatible with the bit line pitch of the Flash memory array.

It is yet another objective of the present invention to bias the gate ofthe select transistor of the EEPROM cell during CHE (Channel HotElectron) program operation with a voltage that is sufficiently high toallow a sufficiently small select transistor to allow an EEPROM cellfootprint that is compatible with the bit line pitch of the Flash memoryarray.

It is still another objective of the present invention to organizeEEPROM memory cells into bytes within pages, wherein each byte has eighttwo-transistor EEPROM cells with a common word line WL, select gate SG,source line SL, and eight bit lines BL.

It is still yet another objective of the present invention to organizedEEPROM memory array into either horizontal or vertical pages.

It is also yet another objective of the present invention to provide abyte-word line decoder that selects EEPROM memory cells organized bybyte and in either horizontal or vertical pages or a page of randomselection order.

It is also still another objective of the present invention to organizea one-transistor Flash memory array by block with a divided bit linedevice smaller than a traditional device, wherein the divided bit linedevice is a N-channel device that can be made the same as or littlelarger than the select transistor of the two-transistor EEPROM of thepresent invention.

It is also still another objective of the present invention to employthe same CHE program and FN channel-erase schemes for the one-transistorFlash cell and the two-transistor EEPROM cell.

It is yet also another objective of the present invention to organizethe EEPOM memory cells and the Flash memory cells connected to a commonbit line within the same column address space.

It is further an objective of the present invention to organize theEEPROM cells into a plurality of arrays in which each array contains abyte-word line decoder and in which the plurality of arrays share thebit line of the same column addressable space.

It is still further an objective of the present invention to providesimultaneous read and write operations between EEPROM and Flash arrayswhere the EEPROM array allows a byte, page and chip write and the Flashmemory array allows block and chip write.

In the present invention a unified technology is created from which anEEPROM memory cell has evolved that incorporates the non-volatilestorage element of a Flash memory cell into the EEPROM cell. The EEPROMcell also contains a select transistor, which has been sized to allowthe EEPROM to be compatible with the bit line pitch of the Flash memorycell. This is accomplished by reducing the size of the select transistorwhich is a result of using a higher than normal program voltage on thegate of the select transistor. Pre-charging the node connecting thenonvolatile storage element and the select transistor of the EEPROMcell, or providing a virtual-ground scheme of each byte, prevents aselect transistor break down. The precharge voltage or virtual-groundsource “bucks” the high bit line voltage connected to non-selected cellsin a selected column so that the Vds of the select transistor can bemade smaller than the Vds of floating-gate cell. Thus, a shorter channellength of the select transistor can be made smaller than or equal to thechannel length of the floating-gate device as required in CHE programoperation.

By making the EEPROM cell compatible with the bit line pitch of theFlash memory array, an EEPROM array, or a number of EEPROM arrays, canbe combined with the Flash memory array such that both share the bitline address space. The EEPROM memory array is comprised of byteaddressable elements within a page. The page can be either orientedhorizontally in the direction of word lines or vertically in thedirection of bit lines or a page of bytes in random bit line andbyte-word line.

A plurality of EEPROM memory arrays, each containing a byte-word linedecoder, can be organized together sharing bit line address space withand with out a Flash memory array sharing the same bit line addressspace within a memory bank. Bank multiplexers connect addresses and datato a plurality of memory banks and allow simultaneous read and write,read and read, write and write to be performed between memory arrays inthe different memory banks. Thus reading of a Flash memory array can beperformed simultaneous to writing to an EEPROM memory array and visaversa. Also simultaneous operations can be performed on a plurality ofFlash memory arrays or a plurality of EEPROM memory arrays.

BRIEF DESCRIPTION OF THE DRAWINGS

This invention will be described with reference to the accompanyingdrawings, wherein:

FIG. 1A shows a schematic diagram of a one-transistor Flash memory cellof the present invention,

FIG. 1B shows a schematic diagram of a two-transistor EEPROM memory cellof the present invention,

FIGS. 2A and 2B show schematic diagrams of the present invention oftwo-transistor EEPROM memory cell connections along a portion of a bitline, wherein two adjacent cells share one common source line in FIG. 2Abut have separate source lines for FIG. 2B,

FIG. 2C shows a table of voltages of the present invention for variousprogramming strategies of the two-transistor EEPROM memory cells shownin FIGS. 2A and 2B,

FIG. 3A shows a schematic diagram of the present invention for a portionof a two transistor EEPROM memory array with a Byte-word line decoderand a common source line for a byte wide column of memory cells,

FIG. 3B shows a schematic diagram of the present invention for a portionof a two transistor EEPROM memory array with a Byte-word line decoderand a source line structure common between adjacent bytes,

FIG. 3C shows a schematic diagram of the present invention for a portionof a two transistor EEPROM memory array with a Byte-word line decoderand with a separated source line structure,

FIG. 4A shows a schematic diagram of the present invention for a portionof a two-transistor EEPROM memory array with Byte-word line-decoder andutilizing horizontal write pages,

FIG. 4B shows a schematic diagram of the present invention for a portionof an EEPROM memory array with Byte-word line-decoder and utilizingvertical write pages,

FIG. 5 is a diagram of the present invention showing a map of datawriting into a horizontal page partitioned into bytes from a Page DataBuffer,

FIG. 6A is a diagram of the present invention showing a map of data forwriting into a vertical page partitioned in bytes from a Page DataBuffer,

FIG. 6B is a diagram of the present invention showing a map of data forwriting bytes of data randomly into vertical pages from a Page DataBuffer,

FIG. 7 is a block diagram of the present invention that combines anEEPROM array and a Flash array sharing the same bit line facilities,

FIG. 8 is a block diagram of the present invention of separate EEPROMand Flash array with a shared data bus and separate addressingstructure,

FIG. 9 is a block diagram of a memory of prior art of a typicalcombinational nonvolatile memory having a plurality of Parameter blocksof EEPROM memory mixed with a plurality of Flash memory banks,

FIG. 10 is a block diagram of the present invention with two-transistorEEPROM and one-transistor Flash arrays in separate memory banks toperform simultaneous read and write, where no bit line is shared betweenFlash and EEPROM memory,

FIG. 11 is a block diagram of the present invention with EEPROM andFlash memory arrays sharing bit lines in the same memory banks toperform simultaneous read and write,

FIG. 12 is a block diagram of the present invention with multiple EEPROMbanks and multiple Flash banks with separate bit lines to performmultiple simultaneous read and write,

FIG. 13, is a block diagram of the present invention with multiple bankseach containing EEPROM and Flash arrays sharing bit lines to performmultiple simultaneous read and write,

FIG. 14 is a flow diagram of the method of erasing the EEPROM array ofthe present invention,

FIG. 15 is a flow diagram of the method of programming the EEPROM arrayof the present invention,

FIG. 16 is a diagram of a first layout and arrangement of byte-word linedecoders connected in columns to byte segments of the two transistorcell array of the present invention,

FIG. 17 is a diagram of a second layout and arrangement of byte-wordline decoders connected in columns to byte segments of the twotransistor cell array of the present invention,

FIG. 18 is a diagram of a third layout and arrangement of byte-word linedecoders connected in columns to byte segments of the two transistorcell array of the present invention,

FIG. 19 is a first cross-sectional view of a byte-wide memory segmentand the layers of metallization for connecting to the memory segments ina column,

FIG. 20 is a second cross-sectional view of a byte-wide memory segmentand the layers of metallization for connecting to the memory segments ina column,

FIG. 21 is a diagram of a first layout and arrangement of byte-word linedecoders connected in rows to byte segments of the two transistor cellarray of the present invention,

FIG. 22 is a diagram of a second layout and arrangement of byte-wordline decoders connected in rows to byte segments of the two transistorcell array of the present invention,

FIG. 23 is a first cross-sectional view of a byte-wide memory segmentand the layers of metallization for connecting to the memory segments ina row, and

FIG. 24 is a second cross-sectional view of a byte-wide memory segmentand the layers of metallization for connecting to the memory segments ina row,

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENT

In FIG. 1A is shown a schematic diagram of the Flash memory cell MC ofthe present invention. The stacked gate transistor 10, which forms thememory cell, has a source diffusion connected to a source line SL and adrain diffusion connected to a bit line BL. The control gate of thestacked gate transistor is connected to a word line WL. The Flash cellof the present invention can be made smaller by reducing coupling ratiofrom Poly2 to floating-gate and by increasing word line voltage tomaintain the same program gate voltages. The erase and programconditions of Flash are listed in Table 1 below. TABLE 1 Voltage BL WLSL Bulk Scheme Erase 0 −18 V 0 0 FN (Channel) Program +5 V +10 V 0 0 CHE

Shown in FIG. 1B is shown a schematic diagram of a two transistor EEPROMmemory cell of the present invention. The Flash and EEPROM memory cellsare fully described in Provisional Application Ser. No. 60/426,614 notedabove which is herein included by reference. The stacked gate transistor10 used in the Flash memory cell MC is connected in series with a selecttransistor 11 STx. The drain diffusion of the select transistor STx isconnected to the bit line BL, and the source diffusion of the stackedgate transistor 10 is connected to a source line SL. The control gate ofthe stacked gate transistor 10 is connected to a word line WL while thegate of the select transistor 11 is connected to a select gate line SGfor the EEPROM memory cell. Using the Flash memory cell MC coupled witha small select transistor STx allows the EEPROM cell to be able to usebit lines on the same pitch as the Flash memory cell MC and facilitatesthe combining of the Flash and EEPROM memory arrays into a chip usingthe same vertical address space provided by the bit lines. The selecttransistor is compensated for the small size by increasing the voltageof the select gate SG. The select transistor, which has a channel lengthshorter than or equal to the channel length of the stack-gate cell,allows adequate current flow to facilitate programming the memory cellMC by channel hot electrons (CHE). In the present invention,approximately 6V BL voltage is used for the EEPROM cell, which is higherthan the 5V that is required for the drain of the Flash cell, ensuresthe voltage drop across STX because the highcurrent CHE program is lessthan 1V. The erase and program conditions of EEPROM are listed in theTable 2 below. TABLE 2 Voltage BL WL SL SG Bulk Scheme Erase 0 −18 V 0 +3 V 0 FN (Channel) Program +6 V +10 V 0 +18 V 0 CHE

In FIGS. 2A and 2B are shown the EEPROM cells of the present inventionconnected along a portion of a bit line BL. The EEPROM cells eachcontain a select transistor M1 a, M2 a, M3 a and M4 a and a stacked gatetransistor M1 b, M2 b, M3 b and M4 b. The gates of the selecttransistors are connected to select gate lines SG1, SG2, SG3 and SG4,and the gates of the stacked gate transistors are connected to wordlines WL1, WL2, WE3 and WL4. In each cell the drain of the selecttransistor M1 a, M2 a, M3 a and M4 a is connected to the bit line BL,the source of the stacked gate transistors M1 b and M2 b are connectedto the source line SL1, and the source of the stacked gate transistorsM3 b and M4 b are connected to the source line SL2. Thus the cells inFIG. 2A are connected in pairs to a source line. The cell containingselect transistor M1 a and stacked gate transistor M1 b is designated asthe selected cell, for which will be shown programming voltages in thetable in FIG. 2C. The configuration in FIG. 2B is different than FIG. 2Ain that the adjacent cells have separated source lines SL1 a and SL1 b,and SL2 a and SL2 b. The separated source lines allow independent sourceline voltages to be applies to adjacent memory cells in a column. Thisallows the source line of a byte width of selected cells to be connectedto ground while the source line of the unselected cells are floated asshown in the FIG. 2C under Program 4 conditions. Both FIG. 2A and FIG.2B only show one bit line of a selected byte of EEPROM cell array of thepresent invention.

In FIG. 2C is shown voltages for different programming schemes for theconfiguration shown in FIG. 2A. The voltages shown are examples and donot necessarily represent actual value. For the first programmingscheme, Program 1, the bit line BL is coupled to approximately +6V andthe source lines SL1 and SL2 are connected to zero volts. For theselected cell the select gate SG1 is coupled to approximately +18V andthe word line WL1 is coupled to approximately +10V. All other word linesWL2, WL3, WL4 and select gates SG2, SG3 and SG4, and the source line SL2are coupled to zero volts to inhibit the non-selected cells fromprogramming disturb. In order to avoid any current leakage throughnon-selected EEPROM cells such as M2 a, M3 a and M4 a in a programoperation, all threshold voltages Vt of the EEPROM cell are designed tobe positive and the gates on word lines WL2-WL4 are grounded without apre-charge bit line in Program 1 operation. The advantage of Program 1is the simple EEPROM cell array. The penalty is the complicatedimplementation of circuit and control flow to correct the Vt of negativecells back to a positive voltage which involves a very long time andpower consumption after erase operation.

The conditions for positive Vt cells in Program 2 are designed to be thesame as Program 1 except a 2V pre-charge is required for the selectedbit lines prior to program operation. The bit line pre-charge can removeany punch-through of the select transistor STx for better reliability.

For Program 3, Program 4 and Program 5, the Vt of EEPROM cells areallowed to be either positive or negative but a bit line pre-charge isrequired prior to program operation. In Program 3, a negative voltage of−3V is applied to all non-selected word lies of WL2, WL3 and WL4 to shutoff the bit line leakage through select transistors STx of M2 a, M3 aand M4 a due to punch-through and possible negative Vt cells of M2 b, M3b and M4 b before pre-charge to the selected bit lines. Program 5differs from Program 3 by applying a ground voltage to the non-selectedword lines with the source line back biased at 2V to shut off the bitline leakage through the possible negative Vt cells of M2 b, M3 b and M4b assuming the Vt is not below −2V. The selected SL1 is still biased atground for appropriate CHE programming for the selected cell M1 b. Thepenalty of Program 4 is that a source line decoder is required todistinguish the source line voltage between the selected andnon-selected source lines. Program 4 is a preferred scheme of thepresent invention to avoid the complexity of bit line pre-charge and theoverhead of a source line decoder by floating the non-selected sourcelines and grounding the selected source line through a transistor gatedby a select gate signal.

Continuing to refer to FIG. 2C, since the select gate transistor STx ofthe EEPROM cell is intended to be made small to be able to fit into asmall footprint that can accommodate the bit line pitch of a Flashstacked gate cell similar to the stacked gate transistor M1 b, M2 b, M3b and M4 b, the channel length is made short to achieve a small channelwidth. However, the select gate transistor is at risk for bit lineleakage due to a gate aid break down through the non-selectedtransistors of M2 a, M3 a and M4 a resulting from the application of +6Von the selected bit line BL during CHE program operation. To overcomethis break down risk, a precharge voltage is created on the sourcediffusion of the select transistors M2 a, M3 a and M4 a of approximately+2V. This is achieved by applying more than 3V to SG1-SG4 with bit lineBL at 2V, WL1-WL4 grounded, and SL1-SL2 grounded for Program 3, Program4 and Program 5 for Vt of cells allowed to be negative. In Program 1 andProgram 2, if the Vt of the cell is negative and gate of the cell isgrounded, the cell still conducts a leakage current when STx has apunch-through during CHE program operation. Note, even when the gate ofthe cell is at ground level the leakage cannot be shut off if the Vt ofthe cell is negative. Only when the Vt of the cell is positive is theleakage prevented with a grounded gate. One possible way to shut offleakage, when the Vt of the cell is negative and gate is at groundlevel, is floating the source of the cell.

The precharge bit line voltage reduces the Vds of the select transistorsSTx to a value around 4V due to the difference between 6V drain and 2Vsource. This 4V Vds is below the Vds 5V of the stack-gate cells of M1 b,M2 b, M3 b and M4 b. As a result, the channel length of Mna (M1 a, M2 a,M3 a and M4 a) can be made smaller than or equal to cells of Mnb (M1 b,M2 b, M3 b and M4 b.

To precharge a cell the bit line BL is coupled to a voltageapproximately equal to the desired precharge voltage. Then the selectgates SG2, SG3 and SG4 of the non-selected cells are coupled with avoltage higher than the desired precharge voltage plus one Vt After ashort period of time, approximately 100 ns, the voltage of the selectgates SG2, SG3 and SG4 are returned to zero volts trapping the prechargevoltage on the source of the select transistors when cells of M1 b-M4 bare biased in a non-conduction state.

In FIG. 3A is shown a portion of a byte-erasable EEPROM memory array ofthe present invention divided into a plurality of byte-units Byte(0) toByte(k). The word lines WL(0) to WL(k) of each byte-unit are connectedto metal lines running vertically along the direction of the bit lines(Y-direction), and connected to the Byte-word line decoder located onthe top of the array. The bytes Byte(0) to Byte(k) form a page fromwhich a plurality of pages can be placed along the X-direction to formany density of EEPROM array. It should be noted that since the Byte-wordline decoder can select any random one of multiple word lines to performread, erase, or program operations, the array has a true byte-erasablecapability. The array of FIG. 3A is a full-featured FLOTOX-type EEPROMarray replacement in which all the source lines of the bytes Byte(0) toByte(k) in one page are connected together to a vertical metal sourceline (SL). Therefore, during program operation, all the source lineswill be applied with the same voltage.

Continuing to refer to FIG. 3A, the Byte-word line decoder (Byte-WLDecoder) is located within a P-well inside a deep N-well. A word lineselect voltage SD(j) is gated by the decoder to the selected word lineWL(0) to WL(k) by decoder signals SB(0) to SB(k). The word line WL(0)connects to the control gates of the storage transistors M0 b to M7 b ofByte(0) and is selected by decoder signal SB(0). Similarly, the wordline WL(k−1) connects to the control gates of the storage transistors M0n to M7 n of Byte(k−1) and is selected by decoder signal SB(k−1). Aselect gate signal SG(0) selects bit lines BL(0) to BL(7) to beconnected to the storage transistors through the select transistors M0 ato M7 a. Similarly, a select gate signal SG(k−1) selects bit lines BL(0)to BL(7) to be connected to the storage transistors through the selecttransistors M0 m to M7 m.

In FIG. 3B is shown a second preferred byte-erasable EEPROM array thatis divided into a plurality of byte-units Byte(0) to (k). In thisembodiment there is a separated source lines structure in which each twoadjacent bytes share one source line SL(0) to save layout area. Eachsource line SL(0) is separated from other source lines and is decoded byextra transistors. Otherwise, all the other array structure, includingthe word line partition and byte-word line decoder, are remained thesame as the previous embodiment.

Continuing to refer to FIG. 3B, an extra source line SL running in thebit line direction is added to facilitate the decode and control of thesource line of each byte. The source SL(0) of each byte is coupled tothe source line SL through the source line select transistor typified byM10 and M20. The gate of the source line select transistor is connectedto proper decoding signals, for example, the select gate signal of eachbyte SG(0) to SG(k). When programming a selected byte, the select gatesignal of that byte will be applied with a high voltage, such as +18Vfor example, to turn on the select transistors on each bit line of thebyte, which will also turns on the source line select transistor. Thisallows the source line of the selected byte to be connected to thevertical metal source line SL that provides 0V to the selected sourceline for CHE programming. Since all the select gates SG(0) to SG(k) ofthe deselected cells are applied with 0V to turn off the selecttransistors of the deselected bytes, it will also turn off the sourceline select transistors of the deselected bytes. This causes the sourcelines of the deselected bytes to be floated and allows this embodimentto realize the preferred bias condition shown in FIG. 2C for Program 4.

In FIG. 3C shows another preferred byte-erasable EEPROM array that isdivided into a plurality of byte-units Byte(0) to Byte(k). Thisembodiment has separated source lines; therefore, each byte in the arrayhas its own individual source line. This provides a fully separatedsource line structure which allows the voltage of the source lines foreach byte to be applied with preferred bias conditions independently.Otherwise, all the other array structure, including the word linepartition and byte-word line decoder, remain the same as the previousembodiment. For example, the source SL(0) to SL(3) of each byte iscoupled to the source line SL through the source line select transistortypified by M10 and M20. The gate of the source line select transistoris connected to proper select gate decoding signals SG(0) to SG(k). Whenprogramming a selected byte, the select gate signal SG(0) to SG(k) ofthe selected byte will be applied with a high voltage, such as +18V, forexample, to turn on the select transistors on each bit lines of thebyte. Meanwhile, this voltage will also turn on the source line selecttransistor connected to the select gate signal, M10 and M20. This allowsthe source line of the selected byte to be connected to the verticalmetal source line SL that provides 0V to the selected source line forCHE programming. Since all the select gates of the deselected cell areapplied with 0V to turn off the select transistors M0 m to M7 m of thedeselected bytes, it will also turn off the source lines of selecttransistors of the deselected bytes. This causes the source lines of thedeselected bytes to be floated, and allows this embodiment to realizethe preferred bias condition as shown in FIG. 2C under the Program 4mode.

In FIG. 4A is shown a portion of a two-transistor EEPROM memory array ofthe present invention based on Program 1 and Program 2 operations. Thearray is organized into horizontal pages, PAGE(0), PAGE(1) to PAGE(k). Abyte-word line decoder selects the EEPROM cells in byte segments in eachpage. The select gate lines SG(0), SG(1), to SG(k) select all the selectgates of the EEPROM cells in a page and the bit lines BLa(0)-BLa(7) toBLn(0)-BLn(7) connect to all cells in a column in the memory array. Avertical source line SLa to SLn connect to the source lines in each bytewide column of cells. Any number of bytes in a selected horizontal pagecan be selected for writing with a self-timed control.

In FIG. 4B is shown a portion of an EEPROM memory array of the presentinvention organized with vertical pages, PAGE(0) to PAGE(m), that areoriented in the direction of the bit lines. Within each page is a columnof a byte wide collection of cells based on Program 1 and Program 2operations. Each byte wide collection of cells is coupled with eight bitlines BLa(0)-BLa(7) to BLn(0)-BLn(7). The byte word line decoder selectsa byte wide collection of cells with in a page and the select gate linesSG(0)-SG(k) couple to byte wide collection of cells between the verticalpages. Any number of bytes in a selected vertical page can be selectedfor writing with a self-timed control.

Unlike FIG. 3, in FIG. 4 is shown a portion of an EEPROM memory array ofthe present invention organized with vertical pages with a feature ofvirtual-ground source lines coupled to a byte wide collection of cellsbetween the vertical pages. This is achieved by adding a N-channeldevice with the drain of the N-channel device connected to the commonsource line of each single byte and the source of the N-channel deviceconnected to ground. For example, the source line of selected byte infirst row is biased to ground through the N-channel device. By applyingVdd to SG(0) and floating the rest of source lines by applying ground tothe rest of SG(k) in either horizontal page or vertical page duringProgram 4 operation.

In FIG. 5 is shown an architectural diagram of the decoding of thehorizontal pages shown in FIG. 3. A map of data is shown writing into ahorizontal page partitioned into bytes from a Page Data Buffer atperiphery through a Y-decoder having latches in each output. Each outputof the X-decoder, which has a latch, allows an independent selection ofa row of EEPROM select gates. The Byte-word line decoder is physicallylocated at the bottom of the array as a layout option of the presentinvention. Horizontal pages PAGE(0)-PAGE(k) are contained within anEEPROM array. Each page contains m+1 bytes, BYTE(0)-BYTE(m). If PAGE(3)is selected, the X-decoder will decode PAGE(3) by coupling the selectgate SG(3) for PAGE(3) to VDD and coupling ground to the select gatesfor the other pages, PAGE(0), PAGE(2) and PAGE(4)-PAGE(k). The Y-decoderand byte-word line decoder will decode each byte of the PAGE(3). Thelatches of X-decoders, byte-word decoders and Y-decoders will be set toremember the numbers of bytes selected for self-timed write operation.Therefore, the data stored in the page data buffer can be written to thecorresponded location of the bytes in the page. It should be noted that,for parallel erase operation, the X-decoder, Y-decoder, and byte-wordline decoder may contain latches circuitry to provide the multipleselection of the word lines and bit lines for multiple bytes.

In FIG. 6A is shown an architectural diagram of the decoding of thevertical pages shown in FIG. 4. A map of data for writing into avertical page partitioned is shown in bytes from a Page Data Buffer atperiphery through Y-decoder having latches in each output. The Byte-wordline decoder is physically located at bottom of the array as anotherlayout option. Vertical pages PAGE(0)-PAGE(m) are contained within anEEPROM array. Each page contains k+1 bytes, BYTE(0)-BYTE(k). If PAGE(3)is selected, the Y-decoder will decode the PAGE(3), and the X-decoderand byte-word line decoder will decode each byte of the PAGE(3). Thus,the data of the page data buffers can be written to the correspondedbytes in the vertical page, PAGE (3). The X-decoder, Y-decoder, andbyte-word line decoder can contain latches circuitry to providemultiple-byte parallel erase operation.

In FIG. 6B is shown an architectural diagram of the decoding of bytes ofdata into the random pages. The map of data shows a random page of datafor writing bytes distributed across a plurality of vertical pagepartitions from a Page Data Buffer at periphery through Y-decoder havinglatches in each output. The Byte-word line decoder is physically locatedat bottom of the array as another layout option. Vertical pagesPAGE(0)-PAGE(m) are contained within an EEPROM array. Each page containsk+1 bytes, BYTE(0)-BYTE(k). The Y-decoder will decode the pagescontaining the bytes to be programmed, and the X-decoder and byte-wordline decoder will decode each byte to be programmed in the verticalpages PAGE(0)-PAGE(m). Thus, the data of the page data buffers can bewritten to the corresponded bytes in the random pages. The X-decoder,Y-decoder, and byte-word line decoder can contain latches circuitry toprovide multiple-byte parallel erase operation.

In FIG. 7 is shown a combination two-transistor EEPROM andone-transistor Flash nonvolatile memory of the present invention, whichuse a unified cell structure, and program and erase schemes. The EEPROMarray and a Flash array share the same bit line facilities, whichinclude the Y-decoder (YDEC), the bit line select (Y-PASS-GATE), senseamplifiers and program buffers (SA/PGM BUFFER), Data I/O buffers andhigh-voltage generator. Separate X-decoders are used for the EEPROMarray and the Flash array.

Continuing to refer to FIG. 7, the EEPROM array 403 and the Flash array404 are stacked vertically so as to share bit lines connected throughthe Y pass gate 407 to the sense amplifier and program buffer 408. Datais transferred to and from the sense amplifiers and program buffersthrough the data I/O buffer 409. Addresses are supplied to theX-decoders 405 and 406 and the Y decoder 411 for addressing differentword lines of the EEPROM and Flash memory respectively. Byte-word(BYTE-WL) decoder is dedicated for selecting byte-word of the EEPROMmemory. Both the EEPROM array and Flash array require on-chip highvoltage charge pumps for erase and program operations. A high voltagegenerator 401 connects the high voltages needed for erase and programoperation to the page buffer 402, X-decoder 405 and 406, and the senseamplifier and program buffer 408. The page buffer 402 is connected tothe byte-word decoder 412 to provide a byte wide data to a selected bytewithin a page. The chip-enable CE and output-enable OE connected to thecontrol circuitry 410 are assigned to the individual memory arrays toavoid data contention in read operation. Also connected to the controlcircuitry 410 is write-enable WE. Since a CPU will not read data fromthe two different memories simultaneously, the address lines, and datalines can be shared by the two nonvolatile memories. The Flash array isused to store program code or data and is erased by page or block. TheEEPROM array is used for storing data in bytes that requireshigh-frequency change rates.

An important feature of the combination memory of FIG. 7 is that theFlash array data can be read out while erasing the EEPROM array withoutany wait state. EEPROM cells only require −18V at the byte-word linesduring an erase operation. As a result, all common bit lines of thiscombinational memory can be fully utilized by the read operation of theFlash array without disturbing the erase operation of the EEPROM arraywithout need of erase verification. During the EEPROM CHE programoperation, few selected bit lines require 6V. The Flash data can besimultaneously read out from the un-selected bit lines for program andprogram verification operations without any wait state. This is not aperfect read while program operation. As a result, a full simultaneousread and erase operation is offered with a limited simultaneous read andprogram operation. An array structure of a non-uniform block of Flasharrays of prior art is used in cellular phone application. Smallerblocks are used like EEPROM arrays but are actually a pseudo EEPROMarrays, which cannot be erased by units of bytes. In order to mimic anEEPROM array, a large array penalty and complicated software arerequired for reading code from Flash and simultaneously writing data toon-chip pseudo EEPROM array. The combination nonvolatile memory of thepresent invention overcomes the bottleneck and provides a real EEPROMarray to simplify the software development and enhance the readperformance.

In FIG. 8 is another array structure of the present invention comprisingFlash and EEPROM arrays in separate address space by bit line selectionbut sharing the same data bus 305, address bus 204, high voltagegenerator 201, and erase/program control circuitry 303 and 304. Thisstructure contains two individual arrays 205 and 206, decoders 202 and203, Y pass gates 207 and 208, sense amplifiers and program buffers 209and 300, and I/O buffers 301 and 302. This allows each array to beindependently accessed for erase, program, and read operation, and thestructure is suitable for simultaneously read and write operations thatare used in cellular phone applications.

Continuing to refer to FIG. 8, the EEPROM array contains both theprogram buffer 300 and the page data buffer 306. The page data buffer306 is used to make the interface of the chip containing the arraycompatible with conventional page-mode EEPROM arrays. Therefore, whenthe page data for the EEPROM array is the input, the data is stored inthe page data buffer 306. After the entire page is transferred, the selfcontrolled write cycle of the internal state machine is started for theEEPROM memory when WEee is activated. Since high-speed CHE programmingis used parallel page mode programming is not preferred because of thehigh current associated with CHE programming. Therefore, the data storedin the page data buffer is transferred to the program buffer bit by bit,and then the program buffer performs the high-speed CHE programming tothe corresponded cell through the Y-decoder, until the entire page databuffer's data is programmed. Assuming a page buffer contains 128 Bytes,and the average CHE programming time is 5 us per cell, the totalprogramming for the bit-by-bit program operation is (5 us×128 Bytes×8bit=5.12 ms), which is suitable for conventional EEPROM product programspecification requirement of 5 ms.

In FIG. 9 is shown a conventional Flash memory chip architecture thathas simultaneous read and write capability. The block diagram of thememory of prior art is a typical combinational nonvolatile memory havinga plurality of Parameter blocks, for example Param(0)a, of EEPROM memorymixed with a plurality of Flash memory banks, either in the same side orthe opposite side of X-decoder performing simultaneous read and writeoperations. Only the Parameter blocks of EEPROM cells share the same bitlines with Flash cells in bank[0] and bank[1].

The memory array of FIG. 9 is divided into a plurality of memory banksBank(0), Bank(1) to Bank(n). One of more of the banks contain severalsmaller memory blocks called parameter blocks Param(0)a to Param(m)a andParam[0]b to Param(m) b. The parameter blocks are used to emulate thefunction of a conventional EEPROM and are used to store the frequentlyupdated data, while the Flash arrays in Banks (0), Bank(1) to Bank(n)503 are used to store the less-frequently altered program code. Addressdata is fed into the chip from chip pads to a read address buffer 500and a write address buffer 501. The read address and the write addressare connected to the X-decoder and Y-decoder of the various memory banksby the bank multiplexer 502. Data is passed to and from the data padsthrough a data output buffer 509 and a data input buffer 507. Data toand from the memory banks is connected to a bank multiplexer 505 byYpass gates 504 controlled by the Y-decoder Ydec. The bank multiplexer505 connects data read from the memory banks to the sense amplifiers508, which connects the data read from the bit lines of the memory banks503 to the data output buffers 509. Data that is to be written into thememory banks 503 is fed from the data input buffers 507 by means of thebyte/page buffer 506 through the bank multiplexer 505 to the Ypass gatesand then to the memory cells selected by the X-decoder and theY-decoder.

Continuing to refer to FIG. 9, the parameter blocks are made by usingthe same one transistor Flash cells as the cells used in the Flasharrays located in the Bank(0), Bank(1) to Bank(n) 503. This does notrequire complex process to combine two different array structures usingone cell technology in one chip. However, the parameter blocks are nottrue EEPROM function-compatible, because the parameter blocks made fromone transistor Flash cells do not have byte-erase capability. Therefore,they have to use a complicated software approach to simulate thebyte-erasable operation of the conventional EEPROM. This softwaresolution causes degradation of the system performance; and may causereliability problem.

In FIG. 10 is shown a preferred embodiment of the chip architecture ofthe present invention that combines a byte-erasable two transistorEEPROM array and block-erasable one transistor Flash memory array in asingle chip by using an identical simple stacked-gate (ETOX) technology.The general structure the multi-bank memory of the preferred embodimentshown in FIG. 10 is similar to that of the prior art memory shown inFIG. 9; therefore the discussion herein will be centered on what isdifferent in the preferred embodiment of the present invention.

Continuing to refer to FIG. 10, the memory structure contains anindividual EEPROM array 510 that uses the two-transistor EEPROM memorycell and the byte-word line decoder of the present invention. The memorystructure also contains a Flash array that uses the one-transistor Flashmemory cell of the present invention, which is divided into a pluralityof individual Bank(0) 511 to Bank(n) 512. The Flash arrays and theEEPROM arrays can be individually selected by the associated X-decoder,Y-decoder, and the Y-pass gates. The memory structure contains aplurality of individual arrays that are partitioned to allowsimultaneous operations, including: Read-while-Write, Write-while-Write,and Read-while-Read if separate Data pads are used for the respectivememories.

The Bank Multiplexers 502 and 505 are the key circuit blocks inperforming the simultaneous functions of the chip containing themultiple memory banks 510, 511, 512. The bottom Bank Multiplexer 505 canselect any of the Flash banks 511 and 512 and the EEPROM array 510 to beconnected to the read circuitry that contains the Sense Amplifiers 508and Data Output Buffer 509 for performing a read operation whileselecting another EEPROM array or a Flash array bank to be connected tothe write circuitry that contains Byte/Page Buffers and Verify SenseAmplifiers 506 and Data Input Buffers 507. At the same time, the topBank Multiplexer 502 can select and send address from the Read AddressBuffer 500 and Write Address Buffer 501 to the corresponded X-decoderand Y-decoder of the selected banks. Therefore, two or more arrays andbanks in the chip can perform simultaneous read-and-write operation.

Continuing to refer to FIG. 10, the Byte/Page Buffer 506 is used toperform the storage of the programmed data and control programming taskssuch as applying high voltage to the bit lines of the selected cells.The Byte/Page Buffer 506 contains any number of bits determined by theapplication requirements. For example, in a system that requires abyte-wide instant data update function, the Byte/Page Buffer 506 maycontain only one-byte (eight bits) buffers to store the data and programthe eight bits into the memory array on the following write operation.However, for a system that features page update operations, then a wholepage worth of data needs to be loaded to the buffer during the loadcycle. In this case, the Byte/Page Buffer needs to contain a page-sizebuffer to temporary store the data and program the data into the memoryarray in the following write operation. The circuits that implement theByte/Page Buffer can be latches, flip-flops, shift-registers, or anyother suitable circuits. If the buffers use latches or flip-flops, thecircuits can have their own decoder circuit to select each byte or unitof data for loading data to and retrieving data from the buffers. Thebuffers can share the Y-decoder or Y-pass gate circuits with any memoryarray when needed. For example, in a configuration that requires a64-byte page in a write application, the 64 bytes of data can be shiftedin or loaded in the 64-byte page buffer in a sequence of load cycles.After the 64 byte data is loaded, the data may be retrieved by theprogram buffer byte-by-byte to perform the program operation. This isparticularly valuable for a program operation using CHE injection, sincethe CHE programming requires high current (i.e. 500 uA) to program eachcell. Depending on the current driving capability of the on-chip highvoltage pump circuitry, the data may be programmed in one byte, apartial byte, or even one bit to reduce the pump circuit output currentrequirement and charge pump circuit size. The program operation isperformed after the successful erase operation of the selected bytes.

Continuing to refer to FIG. 10, it should be noted that the number ofthe Sense Amplifiers 508, Data Output Buffer 509, Byte/Page Buffers andVerify Sense Amplifiers 506, and Data Input Buffer 507 can be anymultiple of the system data interface bus. For example, assuming thesystem has a one-byte data bus. The number of sense amplifiers can be amultiple number of bytes, such as sixteen bites. This will allow twobanks to be read to the output buffers at the same time. Similarly, ifsixteen Data Input Buffers 507 and Byte/Page Buffers and Verify SenseAmplifiers 506 are used, two bytes of data can be inputted andprogrammed to two individual banks simultaneously. This allowssimultaneous Read-while-Read and Write-while-Write operations since theread operation and some write operation may need to occupy the datainput/output interface at the same time. To simplify the description ofthese operations, they will be called simultaneous read-and-writeoperation in the following description of the present invention.

In FIG. 11 is another embodiment of the present invention showing a chiparchitecture that combines the byte erasable two transistor EEPROMarrays with the block erasable one transistor Flash memory array usingthe same stacked gate technology. This embodiment differs from theprevious embodiment of FIG. 10 by placing the EEPROM memory arrays, eachwith a byte word line decoder, together with a large Flash memory arrayin the same memory bank 510, 511 and 512. Since the EEPROM memory cellis small and accommodates the bit line pitch of the Flash memory cell,the two memories are easily coupled to the same bit line within a memorybank without sacrificing additional space. Although the EEPROM arraysare shown located at the top of a memory bank, they can easily belocated anywhere within the memory bank. Multiple banks can be selectedfor simultaneous ‘read while erase’ but only limited ‘read whileprogram’ operations can be performed.

In FIG. 12 is shown another embodiment of the chip architecture of thepresent invention. This embodiment varies from the previous embodimentsin the number of memory banks containing EEPROM array and the number ofmemory banks containing Flash memory arrays. The EEPROM arrays withtheir attendant byte word line decoder are place into memory banks 510a, 511 a, and 512 a while the Flash arrays are in memory banks 510 b,511 b and 512 b. Y-pass gates 504 a controlled by the Y-decoder connectdata to and from the memory banks 510 a, 511 a and 512 a containing theEEPROM arrays. In like manner the Y-pass 504 b gates controlled by theY-decoder connect data to and from the memory banks 510 b, 511 b and 512b containing the Flash memory arrays. Bank multiplexer 502 a connectsaddresses from the read address buffer 500 and the write address buffer501 to the X-decoder and Y-decoder of the memory banks 510 a, 511 a and512 a. Bank multiplexer 502 b connects addresses from the read addressbuffer 500 and the write address buffer 501 to the X-decoder andY-decoder of the memory banks 510 b, 511 b and 512 b. Each individualarray can be selected by the bank multiplexer 505 to perform themulti-tasking of simultaneous read-and-write operations. For example,any two EEPROM arrays, or any two Flash memory arrays, or any singleEEPROM array and any single Flash memory array can be selected by thebank multiplexer 505 to perform simultaneous read-while-read,read-while-write, or write-while-write operations, which providesflexibility for the multiple functions that the chip can perform. Theconfiguration shown in FIG. 12 is suitable for memory card applications.

In FIG. 13 is shown a memory contained on a chip using the combinationof Flash and EEPROM memory arrays of the present invention. The chipcontains 16 Mb of Flash memory, 4 Mb in each of four Flash memory banks,and 256 Kb of byte erasable EEPROM memory, 32 Kb in each of eight EEPROMmemory banks. Associated with each 32 Kb EEPROM memory array is a byteword line decoder. Each section of the combined memory has 1024 BL (bitlines). Each of the 32 Kb EEPROM memory array is coupled to 64 WL (wordlines) and each 4 Mb Flash array is coupled to 4096 WL (word lines). Theuse of the EEPROM cell of the present invention results in a small chipsize, which contains high-density Flash and EEPROM memories. The chiparchitecture of FIG. 13 performs simultaneous read-and-write operations.

In FIG. 14 is shown of the method of the present invention to perform anerase operation on an EEPROM array. There is on-chip page data bufferdesigned to store the write data in the size of the page. The page sizeis usually around 128 B or 256 B. The page buffer comprises of aplurality of latch-cells. Each bit of data requires a latch-cell tostore the data for a write operation. The data to be changed is in unitsof bits or bytes and only a single byte or multiple bytes of data arerequired for changes. A whole page may need to be updated with the sameprogramming and erase P/E performance, in which there are 128 B or 256 Bwithin the page. Each byte has one dedicated bit called a byte flag.This flag is used to store the information about which byte is to beselected for erase and program.

Continuing to refer to FIG. 14, when EEPROM is selected to perform writeoperation, all bytes of page buffers and all bits of byte-flag are toreset to a logical “0” 30. New data is then loaded into the on-chip pagebuffer 31 by means of one or more input buffers and is clocked in by asystem clock. New data containing a logical of “1” will over-write olddata containing a logical “0”. The bits of byte-flags will be set whenthe data of the selected bytes require a change or update. Before anerase operation is performed it is decided whether an erase-verified isneeded or not. In EEPROM design of the present invention, erase-verifyis not a required operation.

When an erase verify is chosen 32 a, then an iterative series shortpulses of erase 33 and verify 34 are performed. The number of shortpulses required depends on the allowed erase time. For better P/Equality and better endurance cycles, more short pulses are preferred. Asa result of built-in page buffers and byte-flag circuits, the data canbe erased in units of bytes, for example, a single byte, multiple bytesand a page that contains 128 B or 256 B. The specification of erase timefor single byte, multiple bytes or a page is the same, approximately 5ms. The width of erase pulse can be set to 1 ms or 100 us depending onthe characteristics of the EEPROM cells. For a 1 ms pulse width, a totalof 5 pulses can be applied for tight-Vt erase below 1V or 0V dependingon which Vt scheme is employed. After the completion of each successfulerase pulse, an erase verify 34 is performed by reading out andverifying the data by means of on-chip sense amplifiers. If the Vt ofthe cells of erased bytes cannot meet the Vt requirement, then theadditional erase pulses will be continuously applied one by one forfurther erase. Erase will only stop when the Vt of the erased cells meeta pre-determined specification. For flexible read while write operation,a preferred erase operation without erase verification can be used forthe present invention.

Continuing to refer to FIG. 14, in the flow path that does not requirean erase-verify 32 b, a single long pulse of erase and a single verifyis performed. The single erase pulse is approximately 5 ms. The data canbe erased in units of bytes, for example, a single byte, multiple bytesand a page that contains 128 B or 256 B. The specification of erase timefor single byte, multiple bytes or a page is the same, approximately 5ms for the EEPROM of the present invention. After the completion of eachsuccessful erase pulse, an erase verify is skipped, and if the Vt of thecells of the erased bytes cannot meet the Vt requirement, then the partis scrapped. Erase will only stop when the allowed erase time of 5 mshas expired.

In FIG. 15 is shown the method of programming the EEPROM cells of thepresent invention. It should be noted that because of the large programcurrent and fast program speed of the CHE programming scheme, single bitor several bit programming is preferred over the page programming. To dothis the internal address counter will control the data stored in thepage data buffer to be transferred to the program buffer bit by bit. Theprogram buffer becomes responsible for applying program pulses to theselected cell according to the desired data. The first memory cell isselected 40 and data is transferred to the program buffer 41. If theneed for verification 42 has been pre selected 42 a, then after thecompletion of each program pulse, a program-verify operation 44 isperformed. If the program data does not meet the specification 44 b, asecond program pulse is applied 43. Once a particular byte meets the Vtspecification 44 a, the address counter will increment to the next cell46, and then repeat the program verify step for the next cell 41, 42 a,43 and 44. This sequence is repeated until the last address of the page.Only those cells with a Vt that fails 44 b to meet the programspecification will receive additional program pulse of the presentinvention.

Continuing to refer to FIG. 15, If prior to programming it was decidedthat program verify was not required 42 b, then each EEPROM cell to beprogrammed will receive a deep programming pulse 47 that is larger thanthe regular 5 us program time. Once the deep programming is completedand if the cell is not the last cell 45, the address is incremented bythe program counter and the next data is transferred to the data buffer41 and the process is repeated 41, 42 b and 47.

FIG. 16 illustrates a first example of a preferred schematic andphysical arrangement for a byte-word line decoder for a two transistorcell array of the present invention. The byte-word line decoder islocated in a P-well within a deep N-well at the top of the arrayvertically in the bit line direction. The select transistors of theEEPROM cells within each page are connected to select gate signalsSG(0)˜SG(k) which run horizontally across the entire array. Eachbyte-word line WL(k) is connected to eight EEPROM cells and isvertically connected to each output of byte-word line decoder. Word lineWL(0) is connected to the eight EEPROM cells forming Byte(0). Word lineWL(1) is connected to the eight EEPROM cells forming Byte(1) and wordline WL(k) is connected to the eight EEPROM cells forming Byte(k). Aglobal word line GWL is connected to each local word line WL(0)˜WL(k)through the byte-word line decoder gates controlled by decoder signalsSB(0)˜SB(k). Bit lines BL0˜BL7 and the source line SL run vertically inthe same direction as the word lines from the Byte-word line decoder.

Unlike prior art that puts the byte-word line decoders in the cellarray, which consumes area for the isolation wells, in the presentinvention the byte-word line decoders are removed from the array andplaced at the vertical end of the array. A plurality of byte-word linedecoders is organized into one large triple well without any welldivision to save area. The number of outputs of each byte-word linedecoder depends on the numbers of metal layers and the pitch betweenmetal lines. The size of each byte-word line decoder will beproportionally increased when the required number of outputs isincreased. Additional metal layers will increase the number of outputswith large savings in the array area as density increases. In one bitline pitch, all different layers of metal lines of different outputsgenerated from each byte-word line decoder can be stacked together inthe 3^(rd) dimension; e.g. z-direction, and connected to the respectivebytes of WL(k) in the y-direction of cell array. When number ofavailable metal lines is limited, the room for more outputs frombyte-word line decoder can be expanded in x-direction to allow moremetal lines to connect to more bytes in y-direction.

FIG. 17 illustrates a second example of a preferred schematic andphysical arrangement of byte-word line decoders and a two-transistorEEPROM cell array of the present invention similar to the configurationshown in FIG. 16. The EEPROM cells in whole cell array are formed in alarge triple P-well without any well division for any peripheral devicesto save array area. The byte-word line decoder, as show on the top ofthe array, is located in another triple P-well. The triple P-wells ofthe cell array and the byte-word line decoder can be independentlybiased to required voltages. The triple P-wells may be located in alarge deep N-well to be isolated from the P-substrate.

FIG. 18 illustrates a third example of a preferred schematic andphysical arrangement of byte-word line decoders and cell array similarto the configuration in FIG. 17 of the present invention. Thetwo-transistor EEPROM cell array has wasted area in the array whenadditional groups of metal lines of different layers of WLi+1˜m andWLi+1˜I are running in the bit line directions from top byte-word linedecoders. This embodiment allows more metal lines from byte-word linedecoders to be connected to more byte-word lines when number ofavailable metal layers is limited by distributing in the horizontaldirection the outputs of the byle-word line decoder. For example, wordline WLk is connected to global word line GWL(k) through the byte-wordline decoder gate controlled by decoder signal SB(k). Word line WLi isconnected to global word line GWL(i) through the byte-word line decodergate controlled by decoder signal SB(k), and word line WLm is connectedto global word line GWL(m) through the byte-word line decoder gatecontrolled by decoder signal SB(k). All word lines connected to globalword line GWL(k) are bundled together and distributed from bundle WL0˜k.All word lines connected to global word line GWL(i) are bundled togetherand distributed from bundle WLk+1˜I, and all word lines connected toglobal word line GWL(m) are bundled together and distributed from bundleWLi+1˜m. Although the cell array has area covered by these additionalmetal lines without any devices underneath, there is still a big savingsin total die area because wasted area is collected together.

FIG. 19 illustrates the cross-sectional view of one group of metal linesof the cell array in FIGS. 16, 17 and 18 of the present invention. Threemetal layers are shown available for inter-connection. The first metallayer M1 closest to cell devices is used for bit line connection. Thesecond metal layer M2 and the third metal layer M3 are used for thevertical (in the direction of the bit lines) connections from the outputof the byte-word line decoders. For each bit line pitch can accommodatean output from the decoder on the second M2 and the third M3 layers.Thus a total sixteen word lines WL1˜WL16 can be vertically connected tosixteen byte-word lines (or sixteen bytes) along the eight-bit linepitches as shown in FIG. 19.

Continuing to refer to FIG. 19, memory cells totaling to one byte areshown in a P-substrate PSUB. Shallow trench isolation STI is shown atboth ends of the eight cells as well as between each cell. A poly2connection is shown for the word line connecting to each cell which isconnected by a via to the first metal layer M1, then connected to thesecond metal layer M2 through a second via and finally to the thirdlayer M3 through a third via where a connection is made to word linedesignated as WL9. The source line SL is shown on the first layer ofmetal and the global word line GWL is shown on the third layer of metal.

In FIG. 20 is shown a second cross-sectional view of one group of metallines of the cell array in FIGS. 16, 17 and 18 of the present invention.Six metal layers M1, M2, M3, M4, m5, and m6 are available forinter-connection. The first layer of metal (M1) is used for bit lineconnection BL0˜BL7 and the source line SL. Five additional layers ofmetallization M2˜M6 are used for connecting the output of the byte-wordline decoder to the byte-word lines with the global word line connectedon metal layer M6. Within each bit line pitch there are five metallayers that can connect the byte-word line decoder to the word lines inthe memory array. Thus a total forty lines can be vertically connectedto forty byte-word lines (or bytes) along the eight-bit line pitches.

In the byte-word line decoder shown in FIGS. 16, 17 and 18, a decodersignal SB0˜SBk selects the decoder gate to connect a global word linesignal GLW to a byte-word line which in turn selects a byte-word of datastored in a row of eight memory cells within a column and thus selectedby the byte-word line from the byte-word line decoder. Each output ofthe byte-word line decoder in a column is interconnected to a byte-wordline that is further connected to eight memory cells in that column,which contain a byte-word of data addressed by the byte-word line. Forthe scheme shown in FIGS. 16 and 17, a plurality of metallization layersis used to wire the interconnections between the byte-word line decoderand the word lines of the byte-words of data stored in the column. Thewiring of the interconnections is within a plurality of metallizationlayers above the bit lines on the first layer of metallization, and theinterconnection between the byte-word line decoder and the word lines ofthe byte-words run in parallel with the bit lines. In FIG. 18 the numberof metallization layers is limited; and therefore, the wiring of theinterconnections between the byte-word line decoder and the word linesof the byte-words in a plurality of columns is routed to the side of acolumn of byte-words to provide a sufficient number of wiring tracks andto save layout space by collecting together the areas needed to wire athe byte-words in a plurality of columns.

The previous discussion has illustrated how to connect to additionalbyte-decoders by running additional groups of byte-word lines. For anyadditional groups of ten metal line pitches (eight bit lines plus onesource line and one word line on the first layer of metallization), eachadditional layer of metal lines can provide ten additional metal linesto connect between the byte-word line decoder and word lines of thememory array. Table 3 lists the results of connecting a number ofbyte-word lines to a number of metal lines in a ten-bit line pitch for atwo-transistor EEPROM memory. The equation NWL=10×(N−1) is showntabulated in Table 3, where NWL is the number of word lines, N is totalthe number of metal layers, and the “−1” accounts for the first layer.

The other advantage of the present invention is the layout of connectingperipheral devices is done only on Metal1. By placing interconnectionsbelow the Metal1 layer, more area is saved. FIG. 19 and FIG. 20 showcross-sectional views of metal lines for connection by using three metallayers and six metal layers, respectively. The EEPROM cells are formedon a P-substrate. The Poly2 gate of one-byte cells is connected betweenPoly 2 and M1, and subsequently, M1 is then connected to M2 on the nextlevel. TABLE 3 Number metal layers Number of Byte-word lines 4 30 5 40 650 N 10 × (N − 1)

In FIG. 21 is shown a fourth example of a preferred schematic andphysical arrangement of a byte-word line decoder and a two-transistorEEPROM cell array of the present invention. In contrast to FIG. 16, thebyte-word line decoder is placed on either the left or right side of thearray. A plurality of byte-word line decoders is organized in one largetriple well to save area. The number of outputs of each byte-decoderdepends on the availability of numbers and line pitches on the metallayers. The size of each byte-decoder will be proportionally increasedwhen the required number of outputs is increased. The use of additionalmetal layers will increase the number of outputs with savings in arrayarea as density increases. In one cell pitch a plurality of metal linesof different outputs generated from each byte-decoder can be stackedtogether in 3^(rd) dimension, e.g. the z-direction, which are connectedto the respective bytes of WL(k) in the x-direction of the cell array.When the number of available metal lines is limited, additionalbyte-decoders have to be inserted in the cell array to allow for themetal layers to connect to more byte-word lines in the x-direction. Theheight of each is two word line pitches. Therefore, this embodiment hasless metal connection capacity as compared with the schemes disclosed inFIGS. 16, 17 and 18.

Continuing to refer to FIG. 21, the two-transistor EEPROM cells in thearray are formed in the P-substrate without any triple P-well; whereas,the byte-word line decoder resides within a P-well inside an N-well. Thebytes within a page are oriented horizontally in the direction of theword lines. Bit lines BL0(0)˜BL7(0) connect to the first byte, Byte0, ofa page. Bit lines BL1(0)˜BL1(7) connect to the second byte, Byte1, ofthe page, and BLk(0)˜BLk(7) connect to the kth byte, ByteK, of thememory page. The source line SL runs vertically in the direction of thebit lines, and the select gate line SG run horizontally across the arrayin the direction of the word lines. The global word line signal GLW isconnected to the word lines WL(0), WL(1)˜WL(k) through the decoderswitches controlled by decoder signals SB(0), SB(1)˜SB(k).

In FIG. 22 is shown a fifth example of a preferred schematic andphysical arrangement of byte-word line decoders and two-transistorEEPROM cell array similar connected to the configuration shown in FIG.21. The EEPROM cells in the array are formed in a large triple wellwithout well division to save array area. The byte-word line decoder isshown on the left side of the array and is located in a triple P-well.This allows the P-wells of the cell array and the byte-word line decoderto be independently biased to the required voltages. The triple P-wellmay be located in a large deep N-well to isolated from the P-substrate.

FIG. 23 illustrates the cross-sectional view of one group of metal linesof the cell array in FIGS. 21 and 22 of the present invention. Threemetal layers Metal1, Metal2 and Metal3 are used for inter-connection.The Metal1 (M1) is used for bit line connections in the lowest level,which run orthogonal to the word lines and the view shown in FIG. 23.Two layers of metallization, Metal2 (M2) and Metal3 (M3) are used forconnecting the output of the byte-word line decoder outputs to thebyte-word lines. The global word line GWL is connected to the decoderusing the a metal line on M3. Each word line pitch can provideinterconnections on two metal layers, thus two lines from byte-word linedecoders can be connected to two byte-word lines (bytes) runninghorizontally in the x-direction within a word line pitch.

Continuing to refer to FIG. 23, the select gate SG of the selecttransistor and word line gate WL (control gate) of the storagetransistor of the two-transistor EEPROM memory cell located on aP-substrate PSUB are shown with the drain of the select transistorconnected by a ‘contact’ to the first layer of metal Metal1, which isused for bit line connections. The two additional layers ofmetallization, Metal2 and Metal3, are used to connect the output fromthe byte-word line decoder to the word lines WL1˜WL7. The third layer ofmetallization is also used to connect the global word line GWL to thebyte-word line decoder.

FIG. 24 illustrates another cross-sectional view of one group of metallines of the cell array in FIGS. 21 and 22 of the present invention.There are six metal layers Metal1 (M1), Metal2 (M2), Metal3 (M3), Metal4(M4), Metal 5 (M5) and Metal6 (M6) that are available forinter-connection wiring The first metal layer M1 is used for bit lineconnection running vertically and orthogonal to the view in FIG. 24.Five metal layers from M2 to M6 are used for connecting outputs of thebyte-word line decoder to the byte-word lines. Each word line pitch hasfive interconnecting metal layers from M2 to M6 for word lineconnections. In total, twenty lines from the byte-word line decoder canbe horizontally connected to twenty byte-word lines (bytes) running inthe x-direction.

In the byte-word line decoder shown in FIGS. 21 and 22, a decoder signalSB0˜SBk selects the decoder gate to connect a global word line signalGWL to a byte-word line which in turn selects a byte-word of data from arow of memory cells. Each output of the byte-word line decoder in a rowis interconnected to a byte-word line that is connected to eight memorycells in that row, which contain a byte-word of data addressed by thebyte-word line. A plurality of metallization layers is used to wire theinterconnections between the byte-word line decoder and the word linesof the byte-words of data stored in the row. The wiring of theinterconnections is done within a plurality of metallization layersabove the first layer of metallization containing the bit lines, andorthogonal to the direction of the bit lines. Thus the wiring betweenthe byte-word line decoder and the word lines of the byte-words runperpendicular to the direction of the bit lines located on the firstlayer of metallization. When the number of available metal lines islimited, additional byte decoders are inserted into the cell array toallow the metal layers to connect to more byte-word lines in a row.

The size of each byte-word line decoder will be proportionally increasedwhen the required number of outputs is increased. The more metal layersthat are available will increase the number of outputs with savings inthe array area as density increases. In the height of one cell for apitch of three word lines, the different layers of metal lines foroutputs generated from each byte-decoder can be stacked together in3^(rd) dimension, e.g. z-direction, and then connected to WL(0), WL(1),and WL(k), the respective byte-word lines in x-direction of a cellarray. When the number of available metal lines is limited, such as inthe case of an array organization with byte-word line decoders locatedhorizontally at the end of word lines sown in FIGS. 21 and 22,additional byte-word line decoders have to be inserted in the cell arrayto allow metal layers to reach far-end of byte-word lines in thex-direction. This increases the array area. Table 4 shows the results ofconnecting a number of byte-word lines to a number of metal lines in thehorizontal direction as shown in FIGS. 21 and 22. TABLE 4 Number metallayers Number of Byte-word lines 4 12 5 16 6 20 N 4 × (N − 1)

While the invention has been particularly shown and described withreference to preferred embodiments thereof, it will be understood bythose skilled in the art that various changes in form and details may bemade without departing from the spirit and scope of the invention.

1. A vertical oriented EEPROM memory array, comprising: a) a column oftwo-transistor memory cells arranged into a plurality of rows ofbyte-wide segments, wherein each byte-wide segment is separatelyaddressable, b) a byte-word line decoder located at an end of saidcolumn connecting to a word line of said byte-wide segments, c) an arrayof said two-transistor memory cells arranged in a plurality of columnsof byte wide segments, wherein each column contains said byte-word linedecoder.
 2. The memory array of claim 1, further comprising: a) a firstplurality of metal lines connecting bit lines and a source line to saidmemory cells in each said byte-wide segment contained within each columnof said plurality of columns and an output of said byte-word linedecoder to said word line of a first byte-wide segment, b) a secondplurality of metal lines connecting between said byte-word line decoderand said word line of each additional byte-wide segment beyond saidfirst byte-wide segment that are contained within each column of saidplurality of columns.
 3. The memory array of claim 2, wherein said firstplurality of metal lines are routed along a length and distributedacross a width of each said column in a first layer of metal lines. 4.The memory array of claim 3, wherein said first plurality of metal linesconnect to eight bit lines, one source line and one word line.
 5. Thememory array of claim 2, wherein said second plurality of metal linesare routed along a length and distributed across the width of each saidcolumn in a plurality of wiring layers of metal lines located above afirst layer of metal lines.
 6. The memory array of claim 5, wherein saidsecond plurality of metal lines connect separately to byte segments in acolumn and are routed in groups of ten metal lines on each wiring layerabove said first wiring layer.
 7. The memory array of claim 5, whereinsaid second plurality of metal lines are clustered together with aplurality of global word lines at the side of said column of byte-widesegments when a number of wiring layers is limited.
 8. A byte-word linedecoder, comprising: a) a decoding means for selecting a byte-word ofdata stored in an EEPROM memory array, b) an interconnection means forconnecting said decoding means to a plurality of byte-word lines in saidmemory array, c) a wiring means for placing said interconnection meansonto a plurality of metalization layers above a bit line metalizationlayer.
 9. The decoder of claim 8, wherein said wiring means placesbyte-word lines within said plurality of metalization layers locatedabove a column of byte-word bit lines on said bit line metalizationlayer and running in parallel with said byte-word bit lines.
 10. Thedecoder means of claim 8, wherein said wiring means places byte-wordlines within said plurality of metalization layers located above aplurality of columns of byte-word bit lines on said bit linemetalization layer and running orthogonal to said byte-word bit lines.